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Infrared fibreoptic temperature monitoring during machining proceduresBELOTSERKOVSKY, E; BAR-OR, O; KATZIR, A et al.Measurement science & technology (Print). 1994, Vol 5, Num 4, pp 451-453, issn 0957-0233Article

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Applications of fluorocarbon polymers in micromechanics and micromachiningJANSEN, H. V; GARDENIERS, J. G. E; ELDERS, J et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 136-140, issn 0924-4247Conference Paper

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LIGA micropump for gases and liquidsRAPP, R; SCHOMBURG, W. K; MAAS, D et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 1, pp 57-61, issn 0924-4247Article

Quantitative evaluation of the quality of the cuts performed on mullite-alumina by Nd:YAG laserQUINTERO, F; POU, J; LUSQUINOS, F et al.Optics and lasers in engineering. 2004, Vol 42, Num 3, pp 327-340, issn 0143-8166, 14 p.Article

Wafer-scale spontaneous bonding of silicon wafers by argon-beam surface activation at room temperatureTAKAGI, Hideki; MAEDA, Ryutaro; SUGA, Tadatomo et al.Sensors and actuators. A, Physical. 2003, Vol 105, Num 1, pp 98-102, issn 0924-4247, 5 p.Article

Optimization and control of drilling burr formation of AISI 304l and AISI 4118 based on drilling burr control chartsKIM, Jinsoo; MIN, Sangkee; DORNFELD, David A et al.International journal of machine tools & manufacture. 2001, Vol 41, Num 7, pp 923-936, issn 0890-6955Article

Excimer laser : a new tool for precision micromachiningENDERT, H; PÄTZEL, R; BASTING, D et al.Optical and quantum electronics. 1995, Vol 27, Num 12, pp 1319-1335, issn 0306-8919Article

Assembling three-dimensional microstructures using gold-silicon eutectic bondingTIENSUU, A.-L; BEXELL, M; SCHWEITZ, J.-Å et al.Sensors and actuators. A, Physical. 1994, Vol 45, Num 3, pp 227-236, issn 0924-4247Article

Automatisation de processus industriels appliquée à un atelier de gravure pour thermomètres médicaux. Projet de machine spéciale «GRAVAUMATE» = Automatic of industriel processes applied to a workshop for printing medical thermometers. Special «GRAVAUMATE» machine projectGress, Hubert; Armbruster, R.1986, 120 p.Thesis

A method to maintain wafer alignment precision during adhesive wafer bondingNIKLAUS, Frank; ENOKSSON, Peter; KÄLVESTEN, Edvard et al.Sensors and actuators. A, Physical. 2003, Vol 107, Num 3, pp 273-278, issn 0924-4247, 6 p.Article

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Improvement of bonding time and quality of anodic bonding using the spiral arrangement of multiple point electrodesHUANG, Jung-Tang; YANG, Hsueh-An.Sensors and actuators. A, Physical. 2002, Vol 102, Num 1-2, pp 1-5, issn 0924-4247, 5 p.Article

PZT-polymer composites fabricated with YAG laser cutterOHARA, Y; MIYAYAMA, M; KOUMOTO, K et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 3, pp 187-190, issn 0924-4247Article

Plasma arc welding : a mathematical model of the arcDOWDEN, J; KAPADIA, P.Journal of physics. D, Applied physics (Print). 1994, Vol 27, Num 5, pp 902-910, issn 0022-3727Article